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Motorized Vacuum Capacitors

Motorized Vacuum Capacitors

Product Description
All the control systems necessary for capacitance control of variable vacuum capacitors have been modularized. Complex impedance matching network control is achieved with simple serial commands.
This is the optimal product for incorporating into high-frequency plasma matching networks and RF power supply circuits.

serial commands.
This is the optimal product for incorporating into high-frequency plasma matching networks and RF power supply circuits.

Features
  • Easy to introduce
  • Highly reliable
  • Highly accurate : ±1%
  • Network building : Max 16Unit
  • Fast communication : RS485 / EtherCAT
Common Specifications

See below for common specifications of serial
communications and motor control.

Common Specifications